Date of Graduation


Document Type


Degree Type



Eberly College of Arts and Sciences


Physics and Astronomy

Committee Chair

David Lederman.


The use of x-ray fluorescence (XRF) for in-situ chemical analysis of a sample surface using an electron gun for reflection high energy electron diffraction (RHEED) analysis has been studied by many groups and the technique is usually referred to as RHEED-total-refection-angle x-ray spectroscopy (RHEED-TRAXS), as the angle for x-ray detection was set close to the angle of total internal reflection.;In the current work, RHEED-TRAXS was developed as a thin film structural characterization technique based on the principles similar to the analysis of a multilayered structure by angular-dependent total-reflection x-rays. Initial experiments utilizing the technique for relative compositional analysis have also been discussed.;Utilizing RHEED-TRAXS as a structural and compositional analysis technique has numerous benefits. In-situ determination of thickness and roughness of film(s) yields information that could be destroyed due to atmospheric exposure and compositional analysis can be used to study and control the growth parameters.;Since a RHEED electron beam gun is a common feature on MBE systems, the addition of a relatively inexpensive x-ray detector on a translation stage adds the capability of exhaustive in-situ analysis where growth parameters can be studied and controlled to a greater degree.