Particulate release from surfaces exposed to a plasma

Authors

J. Goree
T. E. Sheridan

Document Type

Article

Publication Date

1992

Digital Commons Citation

Goree, J. and Sheridan, T. E., "Particulate release from surfaces exposed to a plasma" (1992). Faculty & Staff Scholarship. 280.
https://researchrepository.wvu.edu/faculty_publications/280

Source Citation

Goree, J., &Sheridan, T. E. (1992). Particulate Release From Surfaces Exposed To A Plasma. Journal of Vacuum Science and Technology, A - Vacuum, Surfaces, and Films, 10(6), 3540-3544. http://doi.org/10.1116/1.577781