Striations In Electronegative Capacitively Coupled Radio-Frequency Plasmas: Effects Of The Pressure, Voltage, And Electrode Gap

Authors

Yong-Xin Liu
Ihor Korolov
Edmund Schüngel
You-Nian Wang
Zoltán Donkó
Julian Schulze

Document Type

Article

Publication Date

2017

Digital Commons Citation

Liu, Yong-Xin; Korolov, Ihor; Schüngel, Edmund; Wang, You-Nian; Donkó, Zoltán; and Schulze, Julian, "Striations In Electronegative Capacitively Coupled Radio-Frequency Plasmas: Effects Of The Pressure, Voltage, And Electrode Gap" (2017). Faculty & Staff Scholarship. 687.
https://researchrepository.wvu.edu/faculty_publications/687

Source Citation

Liu, Yong-Xin., Korolov, Ihor., Schüngel, Edmund., Wang, You-Nian., Donkó, Zoltán., & Schulze, Julian.(2017). Striations In Electronegative Capacitively Coupled Radio-Frequency Plasmas: Effects Of The Pressure, Voltage, And Electrode Gap. Physics Of Plasmas, 24(7), 73512. http://doi.org/10.1063/1.4993603