Date of Graduation
Statler College of Engineering and Mineral Resources
Lane Department of Computer Science and Electrical Engineering
An improved apparatus for anodizing aluminum films on Si substrates is presented. In addition, an explanation is given for adapting the system to SiC and glass substrates. The system presented is optimized for throughput and safety to focus on volume production. MOS capacitors created with the system are analyzed with capacitance-voltage measurement techniques to provide insight into device operation. Ni is deposited into porous alumina templates to create Ni nanostructures.
Garman, Christopher James, "Electrical characterization of thin film nanostructure templates" (2001). Graduate Theses, Dissertations, and Problem Reports. 1191.