Semester
Fall
Date of Graduation
2001
Document Type
Thesis
Degree Type
MS
College
Statler College of Engineering and Mineral Resources
Department
Lane Department of Computer Science and Electrical Engineering
Committee Chair
Biswajit Das.
Abstract
An improved apparatus for anodizing aluminum films on Si substrates is presented. In addition, an explanation is given for adapting the system to SiC and glass substrates. The system presented is optimized for throughput and safety to focus on volume production. MOS capacitors created with the system are analyzed with capacitance-voltage measurement techniques to provide insight into device operation. Ni is deposited into porous alumina templates to create Ni nanostructures.
Recommended Citation
Garman, Christopher James, "Electrical characterization of thin film nanostructure templates" (2001). Graduate Theses, Dissertations, and Problem Reports. 1191.
https://researchrepository.wvu.edu/etd/1191