Date of Graduation
Statler College of Engineering and Mineral Resources
Lane Department of Computer Science and Electrical Engineering
Investigating the dynamic behavior of any Micro Electro Mechanical system is critical for better control and fault prediction. Linear Comb Resonator is one such MEMS generic device that exhibits motion parallel to the plane of the chip. The dynamic motion of the Linear Comb Resonator is characterized by various parameters such as mass, force applied and also the stiffness constant of the flexure that holds the device. The aim of the project is to determine the changes caused by the asymmetry in the flexure design and the fluctuations in the behavior of the resonator due to this. The changes in the stiffness constant, resonant frequency and the motion were simulated based on the equations in a previous study. But this theoretical understanding was not sufficient to detect the asymmetries in the device. To understand the effects due to asymmetry, a finite element solid model was developed and analyzed using ANSYS software. (Abstract shortened by UMI.).
Konduparthi, Lakshmi Deepasree, "Optical detection of multiple faults of a MEMS based linear comb resonator" (2005). Graduate Theses, Dissertations, and Problem Reports. 1671.