Date of Graduation


Document Type


Degree Type



Statler College of Engineering and Mineral Resources


Lane Department of Computer Science and Electrical Engineering

Committee Chair

Parviz Famouri


Recent advancements in microfabrication of Micro Electro Mechanical Systems have made MEMS an important part of many applications such as safety and sensor/control devices. Miniature structure of MEMS makes them very sensitive to the environmental and operating conditions. In addition, fault in the device might change the parameters and result in unwanted behavioral variations. Therefore, imperfect device structure, fault and operating point dependencies suggest for active control of MEMS.;This research is focused on two main areas of control and fault diagnosis of MEMS devices. In the control part, the application of adaptive controllers is introduced for trajectory control of the device under health and fault conditions. Fault in different forms in the structure of the device are modeled and foundry manufactured for experimental verifications. Pull-in voltage effect in the MEMS Lateral Comb Resonators are investigated and controlled by variable structure controllers. Reliability of operation is enhanced by active control of the device under fault conditions.;The second part of this research is focused on the fault diagnosis of the MEMS devices. Fault is introduced and investigated for better understanding of the system behavioral changes. Modeling of the device in different operating conditions suggests for the multiple-model adaptive estimation (MMAE) fault diagnosis technique. Application of Kalman filters in MMAE is investigated and the performance of the fault diagnosis is compared with other techniques such as self-tuning and auto self-tuning techniques. According to the varying parameters of the system, online parameter identification systems are required to monitor the parameter variations and model the system accurately. Self-tuning banks are applied and combined with MMAE to provide accurate fault diagnosis systems. Different parameter identification techniques result in different system performances. In this regard, this research investigates the application of Recursive Least Square with Forgetting Factor. Different techniques for tuning of forgetting factor value are introduced and their results are compared for better performance. The organization of this dissertation is as follows:;Chapter I introduces the structure of the MEMS Lateral Comb Resonator; Chapter II introduces the application of control techniques and displacement feedback approach. Chapter III investigates the control approach and experimental results. In chapter IV, a new controller is introduced and designed for the MEMS trajectory controls. Chapter V is about the fault and different techniques of fault diagnosis in MEMS LCRs. Chapter 6 is the future work suggested through the current results and observations. Each chapter contains a section to summarize the concluding remarks.