Date of Graduation

2016

Document Type

Thesis

Degree Type

MS

College

Statler College of Engineering and Mineral Resources

Department

Industrial and Managements Systems Engineering

Committee Chair

Feng Yang

Committee Co-Chair

Majid Jaridi

Committee Member

Erin Leatherman

Abstract

In semiconductor manufacturing, the steady-state behavior of a wafer fab system can be characterized by its cycle time-throughput profiles. These profiles quantify the relationship between the cycle time of a product and the system throughput and product mix. The objective of this work is to efficiently generate such cycle time-throughput profiles in manufacturing which can further assist decision makings in production planning.;In this research, a metamodeling approach based on Stochastic Kriging model with Qualitative factors (SKQ) has been adopted to quantify the target relationship of interest. Furthermore, a sequential experimental design procedure is developed to improve the efficiency of simulation experiments. For the initial design, a Sequential Conditional Maximin algorithm is utilized. Regarding the follow-up designs, batches of design points are determined using a Particle Swarm Optimization algorithm.;The procedure is applied to a Jackson network, as well as a scale-down wafer fab system. In both examples, the prediction performance of the SKQ model is promising. It is also shown that the SKQ model provides narrower confidence intervals compared to the Stochastic Kriging model (SK) by pooling the information of the qualitative variables.

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