Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect

Authors

Edmund Schüngel
Sebastian Mohr
Julian Schulze
Uwe Czarnetzki

Author ORCID Identifier

N/A

N/A

https://orcid.org/0000-0001-7929-5734

https://orcid.org/0000-0002-5823-1501

Document Type

Article

Publication Date

2015

Digital Commons Citation

Schüngel, Edmund; Mohr, Sebastian; Schulze, Julian; and Czarnetzki, Uwe, "Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect" (2015). Faculty & Staff Scholarship. 292.
https://researchrepository.wvu.edu/faculty_publications/292

Source Citation

Schüngel, Edmund., Mohr, Sebastian., Schulze, Julian., & Czarnetzki, Uwe. (2015). Prevention Of Ion Flux Lateral Inhomogeneities In Large Area Capacitive Radio Frequency Plasmas Via The Electrical Asymmetry Effect. Applied Physics Letters, 106(5), 54108. http://doi.org/10.1063/1.4907887