Document Type

Article

Publication Date

2015

Source Citation

Schüngel, Edmund., Mohr, Sebastian., Schulze, Julian., & Czarnetzki, Uwe. (2015). Prevention Of Ion Flux Lateral Inhomogeneities In Large Area Capacitive Radio Frequency Plasmas Via The Electrical Asymmetry Effect. Applied Physics Letters, 106(5), 54108. http://doi.org/10.1063/1.4907887

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