Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect

Authors

Edmund Schüngel
Sebastian Mohr
Julian Schulze
Uwe Czarnetzki

Document Type

Article

Publication Date

2015

Digital Commons Citation

Schüngel, Edmund; Mohr, Sebastian; Schulze, Julian; and Czarnetzki, Uwe, "Prevention of ion flux lateral inhomogeneities in large area capacitive radio frequency plasmas via the electrical asymmetry effect" (2015). Faculty & Staff Scholarship. 292.
https://researchrepository.wvu.edu/faculty_publications/292

Source Citation

Schüngel, Edmund., Mohr, Sebastian., Schulze, Julian., & Czarnetzki, Uwe. (2015). Prevention Of Ion Flux Lateral Inhomogeneities In Large Area Capacitive Radio Frequency Plasmas Via The Electrical Asymmetry Effect. Applied Physics Letters, 106(5), 54108. http://doi.org/10.1063/1.4907887