Slope And Amplitude Asymmetry Effects On Low Frequency Capacitively Coupled Carbon Tetrafluoride Plasmas

Authors

I. Korolov
T. Lafleur
T. Gans
J. Schulze

Author ORCID Identifier

https://orcid.org/0000-0003-2384-1243

N/A

N/A

N/A

Document Type

Article

Publication Date

1-1-2016

Digital Commons Citation

Korolov, I.; Lafleur, T.; Gans, T.; and Schulze, J., "Slope And Amplitude Asymmetry Effects On Low Frequency Capacitively Coupled Carbon Tetrafluoride Plasmas" (2016). Faculty & Staff Scholarship. 960.
https://researchrepository.wvu.edu/faculty_publications/960

Source Citation

Korolov, I., Lafleur, T., Gans, T., Schulze, J. (2016). Slope And Amplitude Asymmetry Effects On Low Frequency Capacitively Coupled Carbon Tetrafluoride Plasmas. Journal of Applied Physics, 119(16), 163301. http://doi.org/10.1063/1.4947453